EE 5320: Microelectronics Fabrication Techniques
(Cross-listed with MSE 5320).
Credits: 4. Contact Hours: Lecture 2, Laboratory 4.
Techniques used in modern integrated circuit fabrication, including diffusion, oxidation, ion implantation, lithography, evaporation, sputtering, chemical-vapor deposition, and etching. Process integration. Process evaluation and final device testing. Extensive laboratory exercises utilizing fabrication methods to build electronic devices. Use of computer simulation tools for predicting processing outcomes. Recent advances in processing CMOS ICs and micro-electro-mechanical systems (MEMS).